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SolicitationsDEPT OF DEFENSENAICS 334513

Atomic Layer Deposition (ALD) Reactor System

DEPT OF DEFENSE · Solicitation N00173-26-Q-TB02 · NAICS 334513 · Small Business Set Aside - Total · Responses due 14 September 2026

Solicitation details

Solicitation numberN00173-26-Q-TB02
Notice ID4755ded2002248cd957542372891d581
AgencyDEPT OF DEFENSE
Sub-tierDEPT OF THE NAVY
Contracting officeNAVAL RESEARCH LABORATORY
NAICS code334513
Product / service code (PSC)6640
Set-asideSmall Business Set Aside - Total
Notice typeCombined Synopsis/Solicitation
Posted01 September 2026
Response deadline14 September 2026
Place of performanceWashington, DC, USA

Description

COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12. This announcement constitutes the only solicitation. Offers are being requested and a separate written solicitation will not be issued. Solicitation number N00173-26-Q-TB02 is issued as a request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes. This acquisition is set-aside for small business concerns. This solicitation incorporates provisions and clauses by reference. The full text of provisions and clauses may be accessed electronically at www.acquisition.gov. The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9. See solicitation attachment, below.

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Source: this notice on SAM.gov. FedSift republishes public federal procurement data and is not affiliated with the U.S. Government. Always confirm dates and requirements against SAM.gov before responding.