Combined Sources Sought Notice and Notice of Intent to Award a Sole Source Contract for X-ray Computed Tomography Microscope

Combined Sources Sought Notice and Notice of Intent to Award a Sole Source Contract for X-ray Computed Tomography Microscope Notice ID: NIST-AMD-NOISSN-26-30500006 Contract Opportunity Type: Sources Sought Response Date: August 18, 2026 at 11:00 AM ET Product Service Code (PSC): 6650 Optical Instruments, Test Equipment, Components and Accessories NAICS Code: 334516 Analytical Laboratory Instrument Manufacturing, with the small business size standard of 1,000 Employees BACKGROUND The National Institute of Standards and Technology (NIST) is conducting market research to identify alternative sources that (a) are capable of meeting NIST s minimum requirements for the following commercial products and commercial services and (b) would be interested in competing for that requirement: The Precision Imaging Facility at the National Institute of Standards and Technology (NIST) is involved in the characterization of metals, semiconductors, and insulators in support of multiple projects. Materials characterization allows NIST scientists to make direct correlations between material processing, (nano)structure, and resulting properties. This work involves the correlation of processing, structure, and properties of semiconductor material devices using three-dimensional X-ray computed tomography (XCT). Consistent with NIST s mission to develop measurement science, a particular research focus is to evaluate the sources of systematic and statistical error that limit the efficacy of XCT techniques, to devise strategies to mitigate these uncertainties, and to develop metrics that quantify the results. The NIST PIF owns and performs research using a Zeiss Versa XRM 500 microscope system. The system is now over ten years old and is no longer eligible for technical service support from the manufacturer or any third parties. NIST now requires a new XCT microscope for micro-scale three-dimensional imaging of semiconductor materials and devices. The new microscope must meet the requirements detailed below and the ability to produce data which is compatible with data previously produced by NIST s current Zeiss Versa XRM 500 microscope system. Line Item 0001: Description: X-ray Computed Tomography Microscope (One) The XCT instrument shall (1) accept prepared (e.g. a glass tube of powder) or bulk samples (e.g. a computer chip) for analysis, (2) generate a high-energy X-ray beam which is transmitted through the thin specimen, (3) detect the transmitted X-rays to produce an projected image of the specimen, (4) rotate and move the specimen using a built-in high-precision specimen while collecting additional images, and (5) use a software algorithm to reconstruct the collected images into a three-dimensional representation of the specimen. The system shall also include the following: System Resolution The system shall have an ultimate spatial resolution of 450 nm or smaller. The minimum achievable voxel size shall be 40 nm or smaller. The system shall be mechanically and electronically stable enough to perform continuous data collection actions that last up to 36 hours. X-ray Source: The X-ray source shall be a sealed tube X-ray source The source voltage shall be variable from 30 kV to 160 kV The maximum power output shall be 25 W or higher. All X-ray source parameters shall be fully controllable from the instrument control software. The instrument shall include all X-ray filters that are required to achieve optimal imaging performance for all X-ray powers, detectors, imaging modes, and software packages included in these specifications. The tool shall include a filter wheel or similar fixture to house multiple X-ray filters. The X-ray filters within the filter wheel shall be adjustable via the instrument control software without physical interaction with the tool. The X-ray source shall move as necessary to accommodate all lenses, detectors, and imaging modes. Specimen Stage: The specimen stage shall allow for 360 rotation of a specimen. The specimen stage shall have a minimum travel of: 50 mm in the X-direction (horizontal, perpendicular to the X-ray source) 100 mm in the Y-direction (parallel to the X-ray source) 50 mm in the Z-direction (vertical, perpendicular to the x-ray source) The stage shall accommodate specimens with a mass up to 25 kg Optics If required by the system design, the instrument shall include all lenses and other optics to attain the system resolution(s) in Section A of this document. The system shall include a two-stage optics-based magnification/detection system to leverage both geometric and optical magnification. The optical system shall include lenses with magnifications of 0.4X, 4X, 20X, and 40X. The optical system shall include a detector that is at least 60 megapixels Detectors, Cameras, and Imaging Modes The instrument shall include a visible light camera inside the radiation enclosure to visualize stage movements with the enclosure door closed. The system shall include a flat-panel type X-ray detector. The total detector size of shall be 6 megapixels or more. The flat panel detector shall allow for a spatial resolution of 12 m or smaller. The system shall include all required optics, lenses, detectors, or imaging modes to allow for the maximum resolution specified in Section A of this document. The system shall include all lenses, detectors, software, and imaging modes required to enable a wide-field imaging mode using one of the standard detectors listed in item b above. The system shall include all lenses, detectors, software, and imaging modes require to enable a wide-field imaging mode with a maximum 2D field of view of 140 mm x 93 mm. The system shall be field upgradable to include a diffraction contrast tomography imaging mode, including all detectors, hardware, and software to enable diffraction contrast tomography. Software The instrument shall include software that provides full control over the instrument, including, but not limited to: Adjusting X-ray energy and/or power Moving all instrument stages in all dimensions Starting, stopping, or modifying data acquisition Saving all data and metadata in an accessible, open format and/or providing full, easy to use export to open formats such as hdf5 or similar for both raw (projection, stage motions, etc.) and processed (3D reconstructions, volumetric resolutions, etc.) data and metadata. The Contractor shall include software and associated licenses to provide support for 3D reconstruction of tomographic datasets. This software shall include: Standard 3D reconstruction of tomographic data sets. Vertical stitching of tomographic data sets to allow for higher effective vertical field of view Segmenting, virtual sectioning, and manipulation of reconstructed 3D tomographic data sets. The Contractor shall provide acquisition and reconstruction software that is integrated with modern artificial intelligence (AI) and machine learning (ML) algorithms. These algorithms shall allow a user to enhance reconstruction, speed up reconstruction, enhance data collection, or speed up data collection. This integrated acquisition and reconstruction software shall be licensed (with software updates) for a minimum of two years. The instrument shall include a software API such that the instrument can be fully controlled using a common scripting language. The API shall include robust documentation for all API functions. Vacuum System: All vacuum pumps and/or vacuum pumping systems that are required by or included with the system shall be oil free. All routine operations of any vacuum system shall be integrated into the instrument control software with software/hardware interlocks that prevent users from accidentally venting any or all of the vacuum system. Computer Workstations The instrument shall include a control computer with all necessary hardware, software, and peripherals to safely operate the XCT system. The Contractor shall provide a high-performance offline workstation (i.e. not connect to the instrument) for postprocessing of collected data. The offline workstation shall include perpetual licenses for all software required to process, analyze, and reconstruct collected data. Radiation Safety The system enclosure shall include all shielding for safe operation of the X-ray source. The system enclosure, X-ray source, and all other parts that may lead to radiation exposure shall be fully interlocked such that the X-ray source cannot operate if the enclosure is opened and/or shielding is removed. The system shall include an X-ray on light to indicate when the X-ray source is powered on and when the internal system shutters are open. The system enclosure shall include one or more pass-throughs to allow wires and/or cables to enter the system while maintaining radiation safety. Remote Operation The instrument shall include all software packages or licenses required to enable remote operation from a remote site Support Equipment If required, the Contractor shall provide a water-cooled water…